| 摘要 |
PROBLEM TO BE SOLVED: To achieve the improvement in a tact time to stably transfer a substrate on a substrate transfer device for bringing the substrate into a non-contact state. SOLUTION: In a transfer unit 6 having a length shorter than that of the substrate in which a raisable and lowerable transfer and lift roller conveyor 60 is mounted between levitation pads 64 for levitating a substrate W, the substrate W transferred from a roller conveyor 30 located on the upstream side is transferred to an inlet levitation stage 10 located on the downstream side while being supported on its under surface by the raised transfer and lift roller conveyor 60. At this time, the transfer and lift roller conveyor 60 is lowered below the levitation surface when the rear end of the substrate W has been transferred to the transfer and lift roller conveyor 60. The entire substrate W is in a levitated state and then transferred by a substrate transfer chuck 8 for retaining and moving on the levitation transfer path the levitated substrate W. COPYRIGHT: (C)2011,JPO&INPIT
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