| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a surface acoustic wave element by which characteristics can be prevented from becoming unstable owing to deposition of the residue of an adhesive material onto a vibration propagation area. SOLUTION: A method of manufacturing a surface acoustic wave element includes: a pattern forming step (a) for forming a conductive pattern including an IDT electrode on one principal surface of a piezoelectric substrate; a hollow protecting film forming step (b) for forming a hollow protecting film covering a vibration propagation area, in which a surface acoustic wave generated by the IDT electrode is propagated, by providing an interval with the vibration propagation area on the one principal surface of the piezoelectric substrate; a substrate thinning step (c) for thinning the piezoelectric substrate by applying an adhesive material on the side of the one principal surface of the piezoelectric substrate, where the hollow protecting film is formed, and performing removal treatment on another principal surface of the piezoelectric substrate in the state where the piezoelectric substrate is fixed via the adhesive material; and an adhesive material removing step (d) for removing the adhesive material applied on the side of the one principal surface of the piezoelectric substrate after the substrate thinning step. COPYRIGHT: (C)2011,JPO&INPIT
|
