Scattering element i.e. small angle scattering element, for scattering electromagnetic radiation of hollow mirror, has support body provided with surface that is modified for smoothing micro roughness in area of surface

摘要

The element has a support body (1) provided with a surface for scattering or reflection, where the surface is modified for smoothing micro roughness in an area of the surface. An additional material (2) is arranged on the surface of the support body such that a material fills micro recesses in the surface of the support body for decreasing predetermined spatial frequencies in the surface of the support body. Refractive index of an additional material corresponds to refractive index of the material of the surface of the support body. An independent claim is also included for a method for manufacturing a scattering element.