METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER

摘要

The invention relates to a method for automatic measurement and for teaching-in of location positions of objects (11) within a substrate processing system (20, 26) in which a sensor carrier (1) is moved by means of a robot end effector (24). Sensor units (2, 3, 4, 5a, 5b) of the sensor carrier (1) are moved along straight movement lines (B1, B2, B3) across the edges (10a, 10b) of the object (11), wherein each of the sensor units (2, 3, 4, 5a, 5b) output at least one sensor signal which changes its value upon detection of an edge (10a, 10b). From the positions of the signal changes along the respective straight movement lines (B1, B2, B3), the location position of the object (11) is determined. Furthermore, the invention relates to a substrate like movable, wireless sensor carrier for carrying out the method according to the invention, with a carrier plate (1a), at least one first sensor unit (4, 5a, 5b) which is mounted on the carrier plate (1a) and which is arranged to detect a first object edge (10a) and a second object edge (10b) of the object (11) during a movement of the sensor carrier (1) on a straight movement line (B1) perpendicular to an object surface (13), and at least one second sensor unit (2, 3) which is mounted on the carrier plate (Ia) and which is arranged to detect at least a first object edge (10b) of the object (11) during a movement of the sensor carrier (1) on a straight movement line (B2) parallel to the object surface (13).