| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide use of magnetic pole pieces which are formed precisely so as to guide magnetic flux through a coil in a MEMS device layer and its making method, in a magnetic circuit used in order to make closed loop operation easy in the MEMS device. <P>SOLUTION: Two opposing substrate layers (128, 124) each having one or more recesses (122, 130) filled with a magnetic material, guide the flow of magnetic flux through the coil (44) in the MEMS device layer (60) to provide for closed loop operation. Magnetic flux flows a first magnetic pole piece through the coil to a second magnetic pole piece. A method of making using lithographic etching technique is also provided. <P>COPYRIGHT: (C)2011,JPO&INPIT |
