INFORMATION PROCESSING METHOD, EXPOSURE TREATMENT SYSTEM USING THE SAME, DEVICE MANUFACTURING METHOD, INFORMATION PROCESSING APPARATUS, AND INFORMATION PROCESSING PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide an information processing method of correcting a data extraction period into a proper period to prevent extracting failure of apparatus data required by a user in a user-specified period.

SOLUTION: According to the information processing method, an extraction period for extracting apparatus data generated by an industrial apparatus is specified and the status of the industrial apparatus is analyzed based on apparatus data of which the occurrence time is within the extraction period. The information processing method has a period altering step S402 to cope with the case where apparatus data necessary for status analysis is not included in the extraction period, wherein, the extraction period is altered so that the apparatus data necessary for status analysis is included in the extraction period.

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