| 摘要 |
PROBLEM TO BE SOLVED: To smoothly discharge a resin mist from a cubicle while preventing a bad influence caused by the attachment of the resin mist to the internal surface of an exhaust pipe for mist discharging upon an apparatus. SOLUTION: A ramp 85 where the resin mist and a cleaning water mist are captured by allowing them to be caught by the lower surface thereof is disposed inside a chamber 81 provided halfway a perpendicular section 71 of the exhaust pipe 70 where a fluid flows from the lower side to the upper side, and a cycle in which the resin mist previously attached is cleaned away by melting it with the cleaning water mist is generated, thereby not allowing much resin mist to be deposited on the ramp 85. COPYRIGHT: (C)2011,JPO&INPIT
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