| 摘要 |
According to one embodiment, an imprinting apparatus includes a first mold configured to hold a disk-shaped stamper on which patterns of recesses and protrusions are formed, a second mold configured to hold a disk-shaped substrate to which a resist is applied so that the substrate faces the stamper held by the first mold, and a suction ring which is disposed around the first mold and in which an inner groove and an outer groove are formed to correspond to an outer periphery portion of the stamper held by the first mold, the inner groove being opened to atmosphere and the outer groove being vacuum-suctioned.
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