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发明名称
Fehlerkennungs- und Steuerungsverfahren für Ionenimplantationsprozesse, und System zum Ausführen davon
摘要
申请公布号
DE112004002106(B4)
申请公布日期
2010.10.14
申请号
DE200411002106T
申请日期
2004.06.04
申请人
ADVANCED MICRO DEVICES INC.
发明人
COSS, ELFIDO JUN.;COWAN, PATRICK M.;MARKLE, RICHARD J.;TSE, TOM
分类号
H01J37/317;H01J37/302;H01J37/304
主分类号
H01J37/317
代理机构
代理人
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