THREE DIMENSIONAL MEMORY DEVICE

摘要

PURPOSE: A 3D memory device is provided so that the manufacturing cost can be reduced in comparison with the other 3D memory device formed into the multilayer. CONSTITUTION: A 3D memory device comprises the semiconductor substrate(100), the insulating layer(150) between the plane word line(160) and the gate, activity post(180), and information storage film(170) is included. The semiconductor substrate comprises the common source area. The insulating layer is by turns laminated between plane word lines and gate on the semiconductor substrate.