| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid ejecting head with improved displacement characteristics of a piezoelectric element, a liquid ejecting apparatus, and an actuator. <P>SOLUTION: The liquid ejecting head includes: a passage forming substrate 10 formed with each pressure generating chamber communicating with each nozzle 21; and each piezoelectric element 300 that causes pressure changes in the pressure generating chamber. The piezoelectric element 300 is configured of a piezoelectric layer 70 containing titanium (Ti) and zirconium (Zr), and a first electrode 60 and a second electrode 80 respectively provided on both sides of the piezoelectric layer 70. The composition ratio Ti/(Zr+Ti) of the zirconium and titanium contained in the piezoelectric layer 70 is in the range of 0.50 to 0.60. At least the part, formed on the first electrode 60, of the piezoelectric layer 70 contains rhombohedral crystals. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
