发明名称 |
NANOSTRUCTURED THIN-FILM FORMED BY UTILIZING OBLIQUE-ANGLE DEPOSITION AND METHOD OF THE SAME |
摘要 |
The present invention discloses a transparent conductive nanostructured thin-film by oblique-angle deposition and method of the same. An electron beam system is utilized to evaporate the target source. Evaporation substrate is disposed on a plurality of adjustable sample stage. Multiple gas control valve and heat source is provided to control the gas flow and temperature within the process chamber. An annealing process is performed after the evaporation to improve the thin-film structure and optoelectronic properties.
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申请公布号 |
US2010261001(A1) |
申请公布日期 |
2010.10.14 |
申请号 |
US20100822658 |
申请日期 |
2010.06.24 |
申请人 |
NATIONAL CHIAO TUNG UNIVERSITY |
发明人 |
CHANG CHIA-HUA;YANG CHIN-SHENG;CHIU CHING-HUA;YU PEI-CHEN;KUO HAO-CHUNG |
分类号 |
B32B3/26 |
主分类号 |
B32B3/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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