发明名称 SUBSTRATE ALIGNMENT
摘要 Systems and methods for imprinting a patterned layer on a substrate are described. Features of patterned layer may be concentrically imprinted in relation to a shaft positioned on a substrate chuck. The substrate may be biased using a radius difference between a diameter of the shaft and an inner diameter of the substrate in relation to a point on an inner edge of the substrate.
申请公布号 WO2010053536(A3) 申请公布日期 2010.10.14
申请号 WO2009US05961 申请日期 2009.11.04
申请人 MOLECULAR IMPRINTS, INC. 发明人 CHOI, BYUNG-JIN;NIMMAKAYALA, PAWAN K.;GANAPATHISUBRAMANIAN, MAHADEVAN
分类号 G03F7/00;G03F9/00 主分类号 G03F7/00
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