| 摘要 |
A stray coating prevention device adapted for a coating chamber for coating substrates, said coating chamber including a coating device for dispensing coating material into the coating chamber; a substrate support adapted to support one or more substrates on a support plane, the substrates each having a backside, the support plane dividing the coating chamber into a rear part and a front part of the coating chamber, and the coating device being located in the front part of the coating chamber; wherein the stray coating prevention device comprises a plurality of adsorption traps, the adsorption traps being provided at a surface of the rear part of the coating chamber. |
