| 摘要 |
PROBLEM TO BE SOLVED: To provide a component for a film-forming apparatus, from which an adhering film formed thereon can be easily removed, and to provide a method for removing an adhering film, by which an adhering film formed on a component for a film-forming apparatus can be efficiently removed. SOLUTION: The component for the film-forming apparatus comprises a base, a precoat layer formed on the base, and a porous thermal sprayed layer formed on the precoat layer. The component is characterized in that the precoat layer is composed of an aqueous inorganic coating agent, and that the difference (¾α<SB>1</SB>-α<SB>2</SB>¾) between the coefficient of linear thermal expansion (α<SB>1</SB>) of the base and the coefficient of linear thermal expansion (α<SB>2</SB>) of the precoat layer is not more than 18×10<SP>-6</SP>/°C. The method for removing an adhering film is characterized in that, after an adhering film is formed, the precoat layer is treated with water and/or water vapor and then the adhering film is removed. COPYRIGHT: (C)2011,JPO&INPIT
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