| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide: a piezoelectric resonator having high reliability over a long period of time; a piezoelectric oscillator; an electronic device; and a method for manufacturing the piezoelectric resonator. <P>SOLUTION: The piezoelectric resonator 200 includes: a package 110 having a cavity 1; a plurality of electrode pads 20 formed within the cavity 1; and a piezoelectric vibrating element 100 having one end supported by a first bonding section 31 and a second bonding section 32 that include silicone base conductive adhesive and are formed on the plurality of the electrode pads 20, respectively. The piezoelectric vibrating element 100 has a piezoelectric substrate 40 having mutually opposing first face 41 and second face 42, a first electrode film 50a that is formed on the first face 41 and electrically connected to the first bonding section 31, and a second electrode film 50b that is formed on the second face 42 and electrically connected to the second bonding section 32. In a supported region of the piezoelectric vibrating element 100 by the first bonding section 31 and the second bonding section 32 and a movable region 42 not supported by the first bonding section 31 or the second bonding section 32, a fluorocarbon resin film 60 is formed on the movable region 42. <P>COPYRIGHT: (C)2011,JPO&INPIT |
