METHOD OF MANUFACTURING DIELECTRIC FILM, METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT, AND METHOD OF MANUFACTURING LIQUID INJECTION HEAD

摘要

PROBLEM TO BE SOLVED: To form a thin film by applying a raw material liquid onto a substrate in a state where an influence of secondary particles is eliminated.

SOLUTION: By a mesh member 67, shear stress larger than that applied by a nozzle (having a concept of including piping 65a) is applied to sol between the nozzle 65 and the substrate 64, and the sol is applied on the substrate 64 in a state where secondary particles produced in the sol are broken right before the substrate 64.

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