发明名称 GATE VALVE DEVICE
摘要 PROBLEM TO BE SOLVED: To install a heater on a valve element for opening and closing an opening, and to easily supply electric power to this heater. SOLUTION: A gate valve 10 includes: the valve element 12 for opening and closing the opening 112 provided on a wall that partitions into adjacent two spaces; a valve body moving device 20 moving the valve element 12; the heater 13 for heating the valve element 12; and a connector electrically connected to the heater 13 and electrically and physically connectable to an electric power output part that outputs electric power to be supplied to the heater 13. The valve element 12, the heater 13, and the connector are integrated. The connector is interlocked with the valve element 12 to be electrically and physically connected to the electric power output part with the valve element 12 blocking the opening 112, and electrically and physically separated from the electric power output part with the valve element 12 opening the opening 112. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010230076(A) 申请公布日期 2010.10.14
申请号 JP20090077968 申请日期 2009.03.27
申请人 TOKYO ELECTRON LTD 发明人 SASAKI KAZUO;NABEYAMA HIROKI
分类号 F16K49/00;F16K3/18;H01L21/31 主分类号 F16K49/00
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