| 摘要 |
PROBLEM TO BE SOLVED: To provide a high-temperature pressure sensor capable of lowering costs and acquiring high precision. SOLUTION: The high-temperature pressure sensor includes a quartz substrate (74) with a cavity etched on one side. A reflective coating (78) is deposited on at least a portion of the cavity. The sensor further includes a ferrule section (68) coupled to the quartz substrate with the cavity therebetween. The cavity exists in a vacuum, and cavity gap (76) is formed between the reflective metal coating and a surface of the ferrule. The sensor also includes an optical fiber (66) enclosed by the ferrule section and extending from the cavity gap to an opposing end of the ferrule section and a metal casing (84) surrounding the ferrule section and the quartz substrate with an opening for optical fiber extending therefrom. The pressure applied to the quartz substrate changes the dimensions of the cavity gap and a reflected signal from the reflective coating is processed as a pressure. COPYRIGHT: (C)2011,JPO&INPIT
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