发明名称 |
SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF BACKSPLASH IN A EUV GENERATION CHAMBER |
摘要 |
A system and method generating an extreme ultraviolet light in an extreme ultraviolet light chamber including a collector mirror, a droplet generation system having a droplet outlet aligned to output a plurality of droplets along a target material path and a first catch including a first open end substantially aligned to the target material path and at least one internal surface oriented toward a second end of the first catch, the second end being opposite from the first open end.
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申请公布号 |
US2010258748(A1) |
申请公布日期 |
2010.10.14 |
申请号 |
US20100720190 |
申请日期 |
2010.03.09 |
申请人 |
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发明人 |
VASCHENKO GEORGIY O.;PARTLO WILLIAM N.;FOMENKOV IGOR V.;SANDSTROM RICHARD L.;ERSHOV ALEXANDER I.;BRANDT DAVID;MILLER JOSHUA J. |
分类号 |
G21K5/02 |
主分类号 |
G21K5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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