An optical module is used to guide an EUV radiation beam. The optical module has a chamber (32) that can be evacuated and at least one mirror accommodated in the chamber (32). The mirror has a plurality of individual mirrors (27), the reflective surfaces (34) of which complement each other to form an overall mirror reflective surface. A supporting structure (36) is mechanically connected to a mirror body (35) of the respective individual mirror (27) via a thermally conductive section (37). At least some of the mirror bodies (35) have an associated actuator (50) for the predefined displacement of the mirror body (35) relative to the supporting structure (36) in at least one degree of freedom. The thermally conductive sections (37) are designed to remove a thermal power density of at least 1 kW/m2 absorbed by the mirror bodies (35) to the supporting structure (36). In one aspect of the optical module, an integrated electronic displacement circuit is associated with each of the displaceable individual mirrors (27) in spatial proximity. In this variant, a central control unit has a signal connection to the integrated electronic displacement circuits of the displaceable individual mirrors (27). The result is an optical module with which lighting optics can be produced which ensure a high EUV radiation throughput even with a non-negligible thermal load on the individual mirrors.
