| 摘要 |
For the inspection of a surface (17) of an object (16), a pattern (29) with a plurality of lighter and darker regions (30, 31, 32, 33) is presented. The areas form a first spatial intensity sequence (34) with a first spatial period (36). The object with the surface is positioned relative to the pattern such that the intensity sequence falls on the surface. The intensity sequence is moved by a defined translation distance (18) relative to the surface, wherein the surface assumes a plurality of different positions relative to the first intensity sequence along the translation distance (18). A plurality of images is recorded which show the surface with the first intensity sequence at the different positions. Properties of the surface are determined according to the images. According to one aspect of the invention, the pattern (29) contains an overlay of at least two different stripe patterns (26, 28) which fall upon the surface together. A first stripe pattern (26) forms the first spatial intensity sequence with the first spatial period (36). An additional stripe pattern (28) forms an additional spatial intensity sequence with an additional spatial period. The at least two different stripe patterns (26, 28) are separated by a filter before the determination of the properties of the surface. The properties of the surface are determined according to the first and/or according to the additional stripe pattern (26, 28). |
