| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a vertical magnetic recording medium which enables suitable orientation control of Ru foundation layer without setting a seed layer conventionally considered as indispensable, shortens a manufacturing process and reduces the cost by eliminating the seed layer. SOLUTION: The method of manufacturing the vertical magnetic recording medium, which is the magnetic recording medium used for vertical magnetic recording and includes at least a soft magnetic layer, a foundation layer, and a magnetic recording layer on a substrate, deposits the soft magnetic layer and then directly deposits the foundation layer composed of ruthenium (Ru) or its chemical compound by applying bias on the soft magnetic layer without putting the other intermediate layer therebetween. COPYRIGHT: (C)2011,JPO&INPIT |
