| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic disk including a protective layer having excellent ability to adhere to a lubricant layer, wear resistance, and corrosion resistance even when the thickness thereof is reduced. SOLUTION: The method is for manufacturing the magnetic disk in which at least a magnetic layer, the protective layer, and the lubricant layer are successively provided on a substrate. The protective layer is formed by chemical vapor deposition (CVD). Initially, film formation is performed using a hydrocarbon-based gas, and in the middle of film formation, a nitrogen or oxygen group element per se or a compound gas is added to the hydrocarbon gas to continue film formation. COPYRIGHT: (C)2011,JPO&INPIT |
