| 摘要 |
PROBLEM TO BE SOLVED: To provide an FIB working device capable of optimizing the working order of working positions scattered on a specimen to be worked. SOLUTION: By having FIB-working requiring a plurality of processes carried out by appropriately rearranging the working order, shortening of a stage moving distance, reduction in the number of times of stage rotation and the reduction in the number of times of mechanism switching, in order to select kinds of working are attained and the total working time is shortened and working accuracy is improved. COPYRIGHT: (C)2011,JPO&INPIT
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