发明名称 |
Method for Making Optical Waveguides |
摘要 |
A method for making a waveguide comprises (a) providing a waveguide structure comprising a substrate (22), a lower cladding (20) layer on the substrate, and a core layer (24) comprising silicon nitride, amorphous silicon, or amorphous silicon-germanium alloy on the lower cladding layer; (b) patterning the core layer; and (c) annealing (28) the waveguide structure.
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申请公布号 |
US2010260462(A1) |
申请公布日期 |
2010.10.14 |
申请号 |
US20080744589 |
申请日期 |
2008.11.21 |
申请人 |
ZHANG JUN-YING;SMITH TERRY L;KOCH BARRY J;YI YASHA |
发明人 |
ZHANG JUN-YING;SMITH TERRY L.;KOCH BARRY J.;YI YASHA |
分类号 |
G02B6/132;B05D5/06;G02B6/02 |
主分类号 |
G02B6/132 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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