| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate measurement of physical constant such as Young's modulus of an oscillator. <P>SOLUTION: A sacrifice layer 103 is isotropically etched through a through-hole 104a with the use of, for instance, a diluted hydrofluoric acid solution, to form a space 131 exceeding the region of the through-hole 104a between an oscillator layer 104 and a GaAs buffer layer 102. For instance, after a resist pattern 105 is removed, a substrate 101 comprising the oscillator layer 104 including the through-hole 104a is immersed in the diluted hydrofluoric acid solution. The sacrifice layer 103 is isotropically etched by the diluted hydrofluoric acid solution entering from the through-hole 104a to form the space 131. <P>COPYRIGHT: (C)2011,JPO&INPIT |
