| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor capable of reducing squeeze-out of a joining member into a flow channel. <P>SOLUTION: The flow sensor 1 includes: a flow sensor chip 2 in which a detection part 7 detecting a flow of a fluid is formed; and a flow channel forming member 3 joined to the flow sensor chip 2 via the joining member (frit glass 9) and forming the flow channel 4 flowing the fluid in corporation with the flow sensor chip 2. In one of the flow sensor chip 2 and the flow channel forming member 3, a recessed part 10 for reducing the squeeze-out of the joining member 9 to the flow channel 4 is formed on a surface joined to the other. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
