| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a molecular layer deposition (MLD) process having high throughput, and to provide a high-performance solar battery, an electroluminence element and an optical switch. <P>SOLUTION: The molecular region division type MLD which separates and arranges reactive gases into different molecular regions and is performed by replacing a base body or the molecular regions serves as a promising means for solving a problem. Further, the assembling of polymer chains/thin films, of which the molecular array is controlled by means of MLD into the solar battery, electroluminence element and optical switch, serves as a promising means for solving the problem. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
