ARRAY-TYPE ULTRASONIC VIBRATOR

摘要

PROBLEM TO BE SOLVED: To provide an array-type ultrasonic vibrator allowing signal wires to be simply formed without separately using a component. SOLUTION: The array-type ultrasonic vibrator 51 includes: a backing layer 32; a plurality of inorganic piezoelectric elements 33 two-dimensionally arranged on the backing layer 32; an acoustic matching layer 52 formed on the plurality of inorganic piezoelectric elements 33 and formed with a silicon substrate having lower acoustic impedance than that of the plurality of inorganic piezoelectric elements 33; an integrated circuit formed on the silicon substrate of the acoustic matching layer 52; and a plurality of organic piezoelectric elements 44 two-dimensionally arranged on the acoustic matching layer 52, wherein the integrated circuit is individually connected to the plurality of organic piezoelectric elements 44, and the number of signal wires extracted from the integrated circuit to the outside is smaller than the number of signal wires for connecting the integrated circuit to the plurality of organic piezoelectric elements 44. COPYRIGHT: (C)2011,JPO&INPIT