| 摘要 |
PROBLEM TO BE SOLVED: To provide a powder filling method and a powder filling device for filling a treatment vessel with a powder capable of more uniformly performing a reaction of the powder by making contact property of the powder with an atmosphere gas sufficient when treatment of the starting material powder is performed at a predetermined atmosphere for manufacturing a desired material powder. SOLUTION: In the powder filling method for filling a boat 2 with the powder 3 to be atmosphere-treated, in the state that a bulk density adjustment member 41 occupying a space at the inside of the powder 3 is present at the inside of the powder 3 fed into the boat 2, vibration is given to the powder 3 and the vibration is stopped, and thereafter, the bulk density adjustment member 41 is removed from the inside of the powder 3. The powder filling device for filling the boat 2 with the powder 3 to be atmosphere-treated is provided with the boat 2 for storing the powder 3; a linear actuator 46 for moving the bulk density adjustment member 41 occupying the space at the inside of the powder 3 between the outside and the inside of the boat 2; and a vibration actuator 52 for giving vibration to the boat 2. COPYRIGHT: (C)2011,JPO&INPIT
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