发明名称 |
CERAMIC SUBSTRATE, METHOD OF MANUFACTURING CERAMIC SUBSTRATE, AND METHOD OF MANUFACTURING POWER MODULE SUBSTRATE |
摘要 |
Disclosed is a ceramic substrate including silicon in which the concentration of a silicon oxide and a silicon composite oxide in the surface thereof is less than or equal to 2.7 Atom %.
|
申请公布号 |
US2010258233(A1) |
申请公布日期 |
2010.10.14 |
申请号 |
US20080734428 |
申请日期 |
2008.11.06 |
申请人 |
MITSUBISHI MATERIALS CORPORATION |
发明人 |
TONOMURA HIROSHI;KITAHARA TAKESHI;ISHIZUKA HIROYA;KUROMITSU YOSHIROU;NAGATOMO YOSHIYUKI |
分类号 |
B32B37/04;B29C35/08;C04B35/14;C04B35/64;G01N33/38 |
主分类号 |
B32B37/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|