发明名称 |
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING A RECESSED CHANNEL MOS TRANSISTOR |
摘要 |
<p>PURPOSE: A semiconductor device manufacturing method is provided to prevent a silicon residual, or silicon walls from remaining in the edge part of a gate trench which is contacted with an element isolation region. CONSTITUTION: A semiconductor device manufacturing method forms an element isolation region confining an activated region. A mask pattern has an opening crossing the activated region. The mask pattern(10) includes an oxide film having an insulation property. A back-up gate trench(15) is formed by etching an exposed activated region with the opening. Semiconductor walls remains in the side walls of the back-up gate trench, which face each other with being contacted with the element isolation region.</p> |
申请公布号 |
KR20100111162(A) |
申请公布日期 |
2010.10.14 |
申请号 |
KR20090029586 |
申请日期 |
2009.04.06 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE, KEUM JOO;CHOI, BO WO;HWANG, IN SEAK |
分类号 |
H01L21/336;H01L29/78 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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