| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve sensitivity of an angular velocity sensor. <P>SOLUTION: The angular velocity sensor includes: a circuit part 11 which outputs a drive signal and to which a detection signal is input; a detection element 12 at least a part of which is vibrated by the input of the drive signal and which outputs a detection signal by the generation of Coriolis force; and a conductor 13 electrically connecting the circuit part 11 and the detection element 12. The detection element 12 includes a base part 12A, arms 12B, 12C connected to the base part 12A, a conductor connection part 12D connected to the conductor 13, and a beam part 12E connecting the conductor connection part 12D and the base part 12A. <P>COPYRIGHT: (C)2011,JPO&INPIT |
