发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR
摘要 PROBLEM TO BE SOLVED: To give stable characteristics to all memory cells included in a memory cell block, in a semiconductor device comprising a memory cell region including a plurality of memory cells. SOLUTION: In a plurality of layers of a semiconductor device, a function pattern 100 that is a pattern necessary for functions of the semiconductor device and a dummy patter 102 not necessary for functions are formed. Between a silicon substrate 80 and the function pattern 100 or between the function patterns, a plug 104 for forming a desired wire configuration is formed. On the other hand, between the dummy patters 102 in each layer, a dummy plug 106 for bringing the dummy pattern 102 into conduction with a terminal at a predetermined potential is formed. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010232669(A) 申请公布日期 2010.10.14
申请号 JP20100118953 申请日期 2010.05.25
申请人 RENESAS ELECTRONICS CORP 发明人 SUGIYAMA MASAO;YOSHIYAMA KENJI
分类号 H01L21/3205;H01L21/8242;H01L23/52;H01L27/108 主分类号 H01L21/3205
代理机构 代理人
主权项
地址