发明名称 WIRING BOARD AND SUBSTRATE FOR PROBE CARD
摘要 PROBLEM TO BE SOLVED: To improve the adhesion strength of a conductor pattern for an insulating layer while improving the chemical resistance. SOLUTION: A wiring board includes an insulating layer 1, a chemical resistance layer 2 buried in a surface part of the insulating layer 1, and a conductor pattern 3 formed on the chemical resistance layer 2. The conductor pattern 3 includes a conductor layer 32. A substrate for a probe card includes an insulating layer 1, a chemical resistance layer 2 buried in a surface part of the insulating layer 1, and a conductor pattern 3 formed on the chemical resistance layer 2. The conductor patter 3 includes a conductor layer 32 and is electrically connected to a contactor 4. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010232339(A) 申请公布日期 2010.10.14
申请号 JP20090077090 申请日期 2009.03.26
申请人 KYOCERA CORP 发明人 WATANABE GEN;ITO SEIICHIRO;OYAMADA TAKESHI
分类号 H05K1/09;G01R1/073;H01L23/12 主分类号 H05K1/09
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