| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable impedance matching circuit of a large applicable frequency range, regarding the variable impedance matching circuit. SOLUTION: In the variable impedance matching circuit including variable capacitive elements VC1 and VC2 and an inductor L1, a variable capacitive element VC3 connected in parallel to the inductor L1 and configuring a parallel resonance circuit with the inductor L1 is provided. The capacitance value of the variable capacitive element VC3 configuring the parallel resonance circuit is turned to a variable width within the range of the capacitance value smaller than the capacitance value at which the parallel resonance circuit resonances and larger than zero. By changing the capacitance value of the variable capacitive element VC3 in the range, the inductance value of the inductor L1 is substantially changed, and the impedance variable range of the impedance matching circuit can be enlarged. COPYRIGHT: (C)2011,JPO&INPIT |
