| 发明名称 |
MASS SENSING DEVICE FOR LIQUID ENVIRONMENT |
| 摘要 |
A device for sensing a mass in a liquid environment including a resonator comprising a piezo layer having a top electrode and a bottom electrode, a sensing surface located adjacent and opposite the top electrode, the resonator and the sensing surface defining a gap therebetween, and a post attached to the sensing surface and the resonator. |
| 申请公布号 |
WO2010118154(A2) |
申请公布日期 |
2010.10.14 |
| 申请号 |
WO2010US30270 |
申请日期 |
2010.04.07 |
| 申请人 |
CURATORS OF THE UNIVERSITY OF MISSOURI;KWON, JAE, WAN |
发明人 |
KWON, JAE, WAN |
| 分类号 |
G01G17/04;B81B7/00;G01F11/00;G01G3/13;G01G3/16;H01L41/00 |
主分类号 |
G01G17/04 |
| 代理机构 |
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代理人 |
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