发明名称 |
METHOD FOR TESTING A TEST SUBSTRATE UNDER DEFINED THERMAL CONDITIONS AND THERMALLY CONDITIONABLE PROBER |
摘要 |
In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant. |
申请公布号 |
KR20100111266(A) |
申请公布日期 |
2010.10.14 |
申请号 |
KR20107010266 |
申请日期 |
2008.10.01 |
申请人 |
SUSS MICROTEC TEST SYSTEMS GMBH |
发明人 |
KIESEWETTER JOERG;KANEV STOJAN;TEICH MICHAEL;STOLL KARSTEN;SCHMIDT AXEL |
分类号 |
G01R31/28;G01R1/067;G01R1/44 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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