| 摘要 |
<p>To prevent reduction in current-carrying capacity due to a reduced diameter of a probe, a probe unit includes the followings: a plurality of large diameter probes; a plurality of small diameter probes having diameters smaller than those of the large diameter probes; a large-diameter probe holder that includes a plurality of large hole portions which individually hold the large diameter probes, and a plurality of reception hole portions which have diameters smaller than those of the large hole portions, communicate with any one of the large hole portions, and receive end portions of the small diameter probes so that the end portions come into contact with the large diameter probes, while a set of the large hole portion and the reception hole portion that communicate with each other pierces through the large-diameter probe holder in a thickness direction; and a small-diameter probe holder that includes a plurality of small hole portions which individually hold the small diameter probes while preventing the small diameter probes from coming off and which pierce through the small-diameter probe holder, and that is stacked on the large-diameter probe holder so that each small hole portion communicates with any one of the reception hole portions. The central axes in a longitudinal direction of the large hole portion and the small hole portion that communicate with each other are separated from each other, and the small hole portions include two small hole portions which are adjacent to each other and of which central axes are separated from each other by a distance shorter than a distance between the central axes of two large hole portions that are corresponding to the two small hole portions.</p> |
