发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for growing a group III nitride crystal, by which a high quality group III nitride crystal having a practical large size and large area can be manufactured at a lower cost compared with the conventional ones, and to provide the group III nitride crystal. <P>SOLUTION: In the method for growing the group III nitride crystal, a gas-liquid interface is formed by bringing a melt 27 containing at least a group III metal into contact with an atmospheric gas containing a nitrogen raw material gas, and a flux and nitrogen is dissolved into the melt 27 from the atmospheric gas side of the gas-liquid interface, and thereby the crystal of the group III nitride 29 is grown in the melt 27 in which the group III metal, the flux and nitrogen are dissolved. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP4562398(B2) 申请公布日期 2010.10.13
申请号 JP20040016600 申请日期 2004.01.26
申请人 发明人
分类号 C30B29/38;C30B9/00;C30B11/06;H01L21/338;H01L27/14;H01L29/778;H01L29/812;H01L31/108;H01L33/06;H01L33/32;H01L33/40;H01L33/62;H01S5/323 主分类号 C30B29/38
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