POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION

摘要

PURPOSE: A positive photosensitive resin composition, a photosensitive resin film, and a semiconductor device using thereof are provided to secure the excellent sensitivity, resolution, and a residue elimination property of the composition. CONSTITUTION: A positive photosensitive resin composition includes a recurring unit marked with chemical formula 1, a polybenzoxazole precursor including a functional group induced from a substituted or non-substituted monoamine compound, a photosensitive diazoquinone compound, a silane compound, a phenolic compound, and a solvent. In the chemical formula 1, X is either an aromatic organo group or a tetravalent~hexavalent aliphatic organic group.