| 摘要 |
PURPOSE: A gate valve for closing and opening a bottom blade is provided to quickly control the operation without equipping a configuration unit such as an actuator and an additional separate anti-corrosion sealing member for fluid passage. CONSTITUTION: A gate valve includes a fluid path(110), a housing(130), a fluid path sealing member(140) and an actuator(150). The fluid passage is connected to the chamber and vacuum pump. The housing has the slider space(120) passing through in the fluid passage through the orthogonal direction. It is inserted between the slider hole and the fluid passage sealing member opens and closes the fluid passage. The actuator transfers the fluid passage sealing member between the slider holes.
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