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发明名称
APPARATUS FOR MANUFACTURING THIN FILM
摘要
申请公布号
EP1008668(B1)
申请公布日期
2010.10.13
申请号
EP19980907230
申请日期
1998.03.12
申请人
PANASONIC CORPORATION
发明人
HONDA, KAZUYOSHI;ECHIGO, NORIYASU;ODAGIRI, MASARU;SUNAGARE, NOBUKI
分类号
H01L21/283;C23C14/00;C23C14/04;C23C14/56;H01L21/3205;H05K3/00;H05K3/04;H05K3/12;H05K3/14
主分类号
H01L21/283
代理机构
代理人
主权项
地址
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