| 摘要 |
PURPOSE: A vacuum processing device is provided to facilitate maintenance and repair by easily detaching an upper lead. CONSTITUTION: A vacuum processing device includes a chamber body(12), a chamber(10), and a detachment tool(30). An opening is formed on the upper side of the chamber body. The chamber is detachably combined with the chamber body and includes an upper lead to open and close the opening of the chamber body. A detaching tool separates the upper lead from the chamber body by rotating the upper lead.
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