Scrubber using Mesh Filter and Apparatus for Exhaust Gas Treatment in Semiconductor Fabrication Equipment using the same,申请号KR20080088346-传众专利搜索

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发明名称	Scrubber using Mesh Filter and Apparatus for Exhaust Gas Treatment in Semiconductor Fabrication Equipment using the same
摘要
申请公布号	KR100987462(B1)	申请公布日期	2010.10.13
申请号	KR20080088346	申请日期	2008.09.08
申请人		发明人
分类号	B01D46/00;B01D46/04	主分类号	B01D46/00
代理机构		代理人
主权项
地址

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