发明名称 Process for producing silicon carbide crystals having increased minority carrier lifetimes
摘要 A process is described for producing silicon carbide crystals having increased minority carrier lifetimes. The process includes the steps of heating and slowly cooling a silicon carbide crystal having a first concentration of minority carrier recombination centers such that the resultant concentration of minority carrier recombination centers is lower than the first concentration.
申请公布号 US7811943(B2) 申请公布日期 2010.10.12
申请号 US20050052679 申请日期 2005.02.07
申请人 CREE, INC. 发明人 CARTER, JR. CALVIN H.;JENNY JASON R.;MALTA DAVID P.;HOBGOOD HUDSON M.;TSVETKOV VALERI F.;DAS MRINAL K.
分类号 H01L21/31 主分类号 H01L21/31
代理机构 代理人
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