MICRO HEAT FLUX SENSOR AND METHOD FOR PRODUCING THE SAID SENSOR

摘要

PURPOSE: A minute heat flux sensor and a manufacturing method thereof are provided to be employed in measuring caloric value of the organic cell. CONSTITUTION: One side of a silicon substrate(210) is polished. An insulating layer(220) is deposited on one side of the silicon substrate. A heat sensing unit(230) is deposited on the insulation layer, and connects the two different metal layers alternately. A main heater(241) is adjacent to the bonding part of the two metal layers formed on one side of the heat sensing unit.