NEEDLE FOR SEMICONDUCTOR PROBE CARD

摘要

PURPOSE: A needle for a semiconductor probe card is provided to prevent a probe needle in a semiconductor probe device from being damaged by dispersing loads with respect to the probe needle. CONSTITUTION: A contact part(11) vertically contacts a probe needle with respect to a chip pad on a semiconductor wafer. An elastic part(15) ensures elasticity from the upper side of the contact part toward the z-axis of the longitudinal direction of the probe needle in order to alleviate stress applied to the probe needle. A connecting part(17) contacts the upper side of the elastic part and a circuit board.