发明名称 Semiconductor device including a P-type field-effect transistor
摘要 A semiconductor device and manufacturing method of the same is provided in which the driving current of a pMOSFET is increased, through a scheme formed easily using an existing silicon process. A pMOSFET is formed with a channel in a <100> direction on a (100) silicon substrate. A compressive stress is applied in a direction perpendicular to the channel by an STI.
申请公布号 US7812398(B2) 申请公布日期 2010.10.12
申请号 US20090400324 申请日期 2009.03.09
申请人 HITACHI, LTD. 发明人 SAITO SHINICHI;HISAMOTO DIGH;KIMURA YOSHINOBU;SUGII NOBUYUKI;TSUCHIYA RYUTA
分类号 H01L27/01;H01L27/12 主分类号 H01L27/01
代理机构 代理人
主权项
地址